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https://doi.org/10.5772/56746

A New Approach to the Habit Determination of Nano-objects by SEM

K. S. Maksimov ; Moscow Institute of Electronic Technology, Zelenograd, Russia
S. K. Maksimov ; Moscow Institute of Electronic Technology, Zelenograd, Russia


Puni tekst: engleski pdf 871 Kb

str. 3-6

preuzimanja: 487

citiraj


Sažetak

A novel approach to the inspection of nanoparticle habit was proposed in our previous papers. This approach is based on a joint analysis of two scanning electron microscopy (SEM) images corresponding to different convergences of illuminating electron beams. However, increasing convergence worsens an image as the result of spherical aberration. Therefore, for the first time in this paper we describe in detail a new approach which is an alternative to the method of two convergences. It is based on the use of two defocusings which are identical in size, but opposite in signs, thereby. simplifying the demands of SEM.

Ključne riječi

nano-object size; nano-object shape; scanning electron microscopy (SEM); convergent illuminating electron beams; electron beams; defocused images

Hrčak ID:

142685

URI

https://hrcak.srce.hr/142685

Datum izdavanja:

1.1.2013.

Posjeta: 880 *