Original scientific paper
Morphological description of composite films
Rudolf Hrach
; Faculty of Mathematics and Physics, Charles University V Holešovičkách 2, 180 00 Prague 8, Czech Republic
Nguyen Le Huong
; Faculty of Mathematics and Physics, Charles University V Holešovičkách 2, 180 00 Prague 8, Czech Republic
Abstract
The initial stages of growth of thin metal films, in two-dimensions (discontinuous metal films on dielectric substrates) and in three-dimensions (plasma-chemically prepared composite films), are studied by a combination of direct measurement and modelling. For the analysis of photographs of films from the transmission electron microscope and the description of spatial distribution of objects, various methods of mathematical morphology were used. The interpretation of the derived characteristics and the extension of the analysis for composite films were performed by the computer experiment. As a result, morphological methods sensitive for the characterisation of distribution of objects in the third dimension were found.
Keywords
Hrčak ID:
299494
URI
Publication date:
2.5.1995.
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