Original scientific paper
Vacuum deposition system for ion-beam-assisted coating technologies
Pavel Hedbávný
; VAKUUM PRAHA spol.s.r.o., V Holešovičkách 2 CZ-180 00 Praha 8, Czech Republic
Petr Stovícek
; VAKUUM PRAHA spol.s.r.o., V Holešovičkách 2 CZ-180 00 Praha 8, Czech Republic
Lothar Siegert
; MAT GmbH DRESDEN, Reisstrasse 3 D-01257 Dresden, Germany
Peter Müller
; MAT GmbH DRESDEN, Reisstrasse 3 D-01257 Dresden, Germany
Abstract
Ion-beam-assisted deposition (IBAD) is increasingly used in thin film technologies to solve problems of adhesion, stress inside layers or to generate special properties of surfaces of solids. A small size IBAD system for use in research laboratories or for industrial use is described. The vacuum system uses a wide range turbomolecular pump and a diaphragm backing pump. The oil free system has a general advantage for thin film technologies. One or more planar magnetrons and a filamentless ion source are arranged in a cylindrical vacuum chamber. The system can be extended by additional chambers for loading, plasma cleaning and unloading. A computer control allows automatic coating procedures or manually controlled actions.
Keywords
Hrčak ID:
299502
URI
Publication date:
2.5.1995.
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