Original scientific paper
https://doi.org/10.1080/00051144.2023.2169157
Probe card-Type multizone electrostatic chuck inspection system
Yoon Sung Koo
; Department of Electronics Engineering, Myongji University, Yongin, Republic of Korea
Jae Hwan Kim
; Department of Electronics Engineering, Myongji University, Yongin, Republic of Korea
Chan Su Han
; Department of Electronics Engineering, Myongji University, Yongin, Republic of Korea
Sang Jeen Hong
; Department of Electronics Engineering, Myongji University, Yongin, Republic of Korea
Abstract
Electrostatic chucks (ESCs) are major components of the equipment used to improve the production yield of wafers and temperature uniformity across wafer surfaces by controlling the wafer temperature precisely. However, ESCs are directly exposed to harsh environments, such as plasma, chemical gases, and high temperature fluctuations. Therefore, ESCs may malfunction if used for a certain period. Therefore, repair and performance verification of failed ESCs are required. In this study, we developed a multizone probe card system suitable for electrical testing of the heating electrodes embedded in ESC control modules to correlate the failure mode factors of ESCs. This system has the advantages of examining the resistance of the internal heating electrode of a 144-zone ESC in a short time and detecting an abnormality in this component based on the measured data. The heating electrode resistance measurement error rate of the developed system was 1%, and the maintenance time was reduced by approximately 66% compared with that of existing ESC maintenance methods.
Keywords
Electrostatic chuck; probe card; heating electrode; resistance; testing
Hrčak ID:
315757
URI
Publication date:
23.1.2023.
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