Original scientific paper
Leak detection limit of counter-flow type leak detector
Genichi Horikoshi
; National Laboratory for High Energy Physics (Emeritus Professor), Kashiwada 3322-7, Ushiku-shi, Ibaraki, 300-12, Japan
Abstract
Paying attention to a two-inlet turbomolecular pump and a new counter-flow leak detector proposed by G. Reich, we made a general survey of leak-detection systems. Among many types of leak-detection systems, we selected several of them, including a system with a new type counter-flow leak detector, and analysed their performances. To evaluate leak-detection performance of the systems, minimum detectable leak and time constant of response are introduced. In terms of these quantities, we evaluate the leak-detection performance of the systems, and explore the leak-detection limit.
Keywords
Hrčak ID:
299457
URI
Publication date:
2.5.1995.
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