Original scientific paper

Interaction of polyether sulphone with oxygen plasma

Lidija I. Belič ; Institute of Electronic and Vacuum Technique, Teslova 30, 61000 Ljubljana, Slovenia
Miran Mozetič ; Institute of Electronic and Vacuum Technique, Teslova 30, 61000 Ljubljana, Slovenia
Karol Požun ; Institute of Electronic and Vacuum Technique, Teslova 30, 61000 Ljubljana, Slovenia

Abstract

Polyether sulphone was found to be a useful material for production of high reliability humidity sensors. In order to obtain best properties of the sensors, the polymer surface should be activated before a thin layer of metal is deposited. A way to do it is exposition of the polymer to oxygen plasma. In order to prevent destructive action of the plasma, a very mild inductively coupled RF oxygen plasma was created in a vacuum system. The plasma density was of the order of 1016 m-3, and the electron temperature 4 eV. Active particles produced in plasma interact with the polymer causing oxidation of the surface layer and a continuous thinning of the polymer foil. In our case the rate of thinning was 25 mm per hour.

Keywords

Hrčak ID:

299607

URI

https://hrcak.srce.hr/299607

Publication date:

2.5.1996.

Article data in other languages: croatian

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