Tehnički vjesnik, Vol. 32 No. 5, 2025.
Izvorni znanstveni članak
https://doi.org/10.17559/TV-20240712001841
Design and Performance Analysis of Dual Straight Beam MEMS Micro Mirrors for Enhanced Scanning Capabilities
Lin Zhang
; School of Electronic Information Engineering, Geely University of China, Chengdu, 641423
Qian Wang
; School of Electronic Information Engineering, Geely University of China, Chengdu, 641423
Yuanlin Xia
; Sichuan University, Chenghua District, Chengdu, China
*
YanTing Xia
; School of Electronic Information Engineering, Geely University of China, Chengdu, 641423
Lei Zhong
; Sichuan University, Chenghua District, Chengdu, China
* Dopisni autor.
Sažetak
Micro-Opto-Electro-Mechanical Systems (MOEMS) technology is rapidly developing, with micro scanning devices centered around MEMS micro-mirrors increasingly becoming a research focus. Addressing the shortcomings of single-cantilever MEMS micro-mirrors, which suffer from high beam stress, small scanning angles, and inadequate frequency response, the study proposes a novel dual axis micro mirror with a dual straight beam structure to address limitations in current MEMS micro mirror designs. Using COMSOL finite element software, we optimized the structural dimensions and conducted performance simulations. The proposed design achieves a fast axis resonant frequency of 4397 Hz with a maximum scanning angle of 31°, and a slow axis resonant frequency of 422.3 Hz with a maximum scanning angle of 50.2°. Compared to single beam structures, our design demonstrates 17.2% and 18.7% stress reduction for fast and slow axis scanning respectively, under equivalent deflection. This dual straight beam MEMS micro mirror offers improved mechanical deflection performance, reduced crosstalk, and enhanced scanning capabilities, contributing to advancements in optical systems and scientific exploration.
Ključne riječi
dual straight beam; electromagnetic Drive; MEMS Micro Mirrors Stress
Hrčak ID:
335048
URI
Datum izdavanja:
30.8.2025.
Posjeta: 355 *