Izvorni znanstveni članak

Oxygen reflex plasma diagnostics

Emil Barna ; Faculty of Physics, The Bucharest University, P.O. Box MG-11, 76900 Bucharest-Magurele, Romania
Vania Covlea ; Faculty of Physics, The Bucharest University, P.O. Box MG-11, 76900 Bucharest-Magurele, Romania
Horia Andrei ; Faculty of Physics, The Bucharest University, P.O. Box MG-11, 76900 Bucharest-Magurele, Romania
Emil I. Toader ; Faculty of Physics, The Bucharest University, P.O. Box MG-11, 76900 Bucharest-Magurele, Romania

Sažetak

An oxygen reflex discharge was investigated. The voltage-current characteristics of the discharge have been measured at pressures between 6.65×10-2 Pa and 13.3 Pa (5×10-4 to 10-1 torr). Other discharge parameters, i.e. electron temperature and plasma concentration, were determined for three different discharge currents using Langmuir electrostatic-probe technique. A sheath theoretical model gave us another set of results for plasma concentration which confirmed the results obtained by the probe technique. Concentrations obtained (about 1017 m-3) are very high, comparable to those in RF reactors, so the reflex plasma can be used for technological purposes.

Ključne riječi

oxygen reflex discharge; voltage-current characteristics; electron temperature; plasma concentration; sheath theoretical model

Hrčak ID:

301062

URI

https://hrcak.srce.hr/301062

Datum izdavanja:

1.6.2000.

Podaci na drugim jezicima: hrvatski

Posjeta: 183 *