Izvorni znanstveni članak
Parametrization of electron energy distribution function in glow discharge plasma under RF electromagnetic fields
A. A. Azooz
; Department of Physics, College of Science, Mosul University, Mosul, Iraq
Sažetak
A set of twenty four plasma glow discharge experiments using radio-frequency electromagnetic fields were carried out. The discharge pressure was 27 Pa. Dried air was used as the discharge gas. Axial radio-frequency fields between 0.6-1.2 MHz were applied. Four different values of the RF field intensity were used. For each case, the plasma Langmuir probe characteristics were measured. A computational method was used to extract the electron energy distribution function in each case. Values of the plasma density and plasma temperature were obtained directly from the fits. They compare well with values obtained using the conventional logarithmic method. The Maxwellian behaviour of the distribution function was established to hold in many but not in all cases.
Ključne riječi
plasma glow discharge; electron energy distribution; plasma density; plasma temperature; deviations from Maxwellian distribution
Hrčak ID:
301809
URI
Datum izdavanja:
1.10.2004.
Posjeta: 529 *