Original scientific paper
Structure and optical properties of thin titanium films deposited on different substrates
Siham Mahmoud
; Physics Department, National Research Centre, Cairo, U. A. R.
Abstract
Thin films of titanium have been deposited on different substrates at room temperature. Measurements were made of the optical constants and of the transmittance of titanium films evaporated onto fused quartz. 10 nm to 40 nm thick films of titanium were found to have quite uniform transmittance throughout the visible spectrum. Since titanium getters strongly during its evaporation, pure and compact titanium films can only be produced by fast evaporation under extremely good vacuum conditions1). All films prepared for optical measurements, for X-ray and for scanning electron microscopy studies were, therefore, deposited at a pressure ≈ 10-4 Pa and with deposition rate ≈ 4 nm/s. The measurements were made using a Beckman double beam spectrophotometer UV 5230, Siemens D 500 X-ray diffractometer, and SEMCO nanolab 7 scanning electron microscopy.
Keywords
Hrčak ID:
331163
URI
Publication date:
6.4.1987.
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