Original scientific paper

Superelastic collisions in silane discharges

Zoran Lj. Petrović ; Institute of Physics, P. O. Box 57, 11001 Belgrade, Yugoslavia
Branislav M. Jelenković ; Institute of Physics, P. O. Box 57, 11001 Belgrade, Yugoslavia

Abstract

The aim of this paper is to show that superelastic collisions between electrons and vibrationally excited silane molecules may influence the kinetics of electrons in silane discharges. It was found that non-equilibrium vibrational temperature as large as 2000 K may be expected which increases significantly the rate of dissociation (and of other inelastic processes) as compared to the results for the gas in equilibrium at the room temperature.

Keywords

Hrčak ID:

331450

URI

https://hrcak.srce.hr/331450

Publication date:

5.12.1988.

Article data in other languages: serbian

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