Original scientific paper

Vacuum deposition system for ion-beam-assisted coating technologies

Pavel Hedbávný ; VAKUUM PRAHA spol.s.r.o., V Holešovičkách 2 CZ-180 00 Praha 8, Czech Republic
Petr Stovícek ; VAKUUM PRAHA spol.s.r.o., V Holešovičkách 2 CZ-180 00 Praha 8, Czech Republic
Lothar Siegert ; MAT GmbH DRESDEN, Reisstrasse 3 D-01257 Dresden, Germany
Peter Müller ; MAT GmbH DRESDEN, Reisstrasse 3 D-01257 Dresden, Germany

Abstract

Ion-beam-assisted deposition (IBAD) is increasingly used in thin film technologies to solve problems of adhesion, stress inside layers or to generate special properties of surfaces of solids. A small size IBAD system for use in research laboratories or for industrial use is described. The vacuum system uses a wide range turbomolecular pump and a diaphragm backing pump. The oil free system has a general advantage for thin film technologies. One or more planar magnetrons and a filamentless ion source are arranged in a cylindrical vacuum chamber. The system can be extended by additional chambers for loading, plasma cleaning and unloading. A computer control allows automatic coating procedures or manually controlled actions.

Keywords

Hrčak ID:

299502

URI

https://hrcak.srce.hr/299502

Publication date:

2.5.1995.

Article data in other languages: croatian

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