Review article

https://doi.org/10.31803/tg-20220424124800

Linear Displacement and Straightness Measurement by Fabry-Perot Interferometer Integrated with an Optoelectronic Module

Syuan-Cheng Chang orcid.org/0000-0003-3258-4381 ; National Yunlin University of Science and Technology, 123 University Road, Section 3, Douliou, Yunlin 64002, Taiwan, R.O.C.
Chung-Ping Chang ; National Chiayi University, 300 Syuefu Road, Chiayi 600355, Taiwan, R.O.C.
Yung-Cheng Wang ; National Yunlin University of Science and Technology, 123 University Road, Section 3, Douliou, Yunlin 64002, Taiwan, R.O.C.
Ze-Fong You ; National Yunlin University of Science and Technology, 123 University Road, Section 3, Douliou, Yunlin 64002, Taiwan, R.O.C.

Abstract

This research develops a three degrees of freedom (DOF) measurement system by integrating Fabry-Perot interferometer and photoelectronic inspection module to determine linear displacement, horizontal and vertical straightness geometric error parameters simultaneously. The interferometer and the photoelectronic inspection module in a three DOF measurement system share the same light source, and the two structures are used to measure linear displacement and straightness errors. The experimental results are utilized to calculate the relevant error parameters according to ISO standards and numerical analysis. They show that after the machine error compensation, the positioning deviation of the system is reduced from 55 μm to 19 μm, corresponding to the reduction of 65%. The accuracy is promoted from 65 μm to 31 μm, about the improvement of 52%. The horizontal and vertical straightness errors of the machine are 4.30 μm and 5.71 μm respectively.

Keywords

interferometer; linear displacement; optoelectronic module; straightness measurement

Hrčak ID:

279416

URI

https://hrcak.srce.hr/279416

Publication date:

21.6.2022.

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