Original scientific paper
Influence of deposition angle of upper electrode on response time of relative-humidity sensors
Karol Požun
; Inštitut za Elektroniko in Vakuumsko Tehniko, Teslova 30, 1111 Ljubljana, Slovenia
Boštjan Paradiz
; Inštitut za Elektroniko in Vakuumsko Tehniko, Teslova 30, 1111 Ljubljana, Slovenia
Jan Leskovšek
; Inštitut za Elektroniko in Vakuumsko Tehniko, Teslova 30, 1111 Ljubljana, Slovenia
Abstract
Construction and testing of thin-film capacitive relative-humidity sensors, using a polymer film as dielectric, are presented. Methods of deposition of the upper electrode, which must have proper electrical conductivity and be porous to assure a quick response to changes of relative humidity in the environment, is discussed. The upper electrodes were deposited by vacuum evaporation of Ni, Cr and Ni-Cr alloy. The angle of incidence of evaporated material was varied with the aim to change porosity and, therefore, the response time.
Keywords
Hrčak ID:
299600
URI
Publication date:
2.5.1996.
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