Original scientific paper

https://doi.org/10.31803/tg-20230829155921

Atomic Force Microscopy: Step Height Measurement Uncertainty Evaluation

Andrej Razumić orcid.org/0000-0002-1257-0233 ; University of Zagreb, Faculty of Mechanical Engineering and Naval Architecture, Ivana Lučića 5, 10000 Zagreb, Croatia *
Biserka Runje orcid.org/0000-0002-7786-0864 ; University of Zagreb, Faculty of Mechanical Engineering and Naval Architecture, Ivana Lučića 5, 10000 Zagreb, Croatia
Dragutin Lisjak ; University of Zagreb, Faculty of Mechanical Engineering and Naval Architecture, Ivana Lučića 5, 10000 Zagreb, Croatia
Davor Kolar orcid.org/0000-0002-5622-6434 ; University of Zagreb, Faculty of Mechanical Engineering and Naval Architecture, Ivana Lučića 5, 10000 Zagreb, Croatia
Amalija Horvatić Novak ; University of Zagreb, Faculty of Mechanical Engineering and Naval Architecture, Ivana Lučića 5, 10000 Zagreb, Croatia
Branko Štrbac orcid.org/0000-0003-3892-2767 ; University of Novi Sad, Faculty of Technical Sciences, Trg Dositeja Obradovića 6, Novi Sad, Serbia
Borislav Savković orcid.org/0000-0002-9037-2179 ; University of Novi Sad, Faculty of Technical Sciences, Trg Dositeja Obradovića 6, Novi Sad, Serbia

* Corresponding author.

Abstract

The atomic force microscope (AFM) enables the measurement of sample surfaces at the nanoscale. Reference standards with calibration gratings are used for the adjustment and verification of AFM measurement devices. Thus far, there are no guidelines or guides available in the field of atomic force microscopy that analyze the influence of input parameters on the quality of measurement results, nor has the measurement uncertainty of the results been estimated. Given the complex functional relationship between input and output variables, which cannot always be explicitly expressed, one of the primary challenges is how to evaluate the measurement uncertainty of the results. The measurement uncertainty of the calibration grating step height on the AFM reference standard was evaluated using the Monte Carlo simulation method. The measurements within this study were conducted using a commercial, industrial atomic force microscope.

Keywords

atomic force microscope; measurement uncertainty; Monte Carlo simulation

Hrčak ID:

316902

URI

https://hrcak.srce.hr/316902

Publication date:

31.5.2024.

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