Izvorni znanstveni članak

Influence of deposition angle of upper electrode on response time of relative-humidity sensors

Karol Požun ; Inštitut za Elektroniko in Vakuumsko Tehniko, Teslova 30, 1111 Ljubljana, Slovenia
Boštjan Paradiz ; Inštitut za Elektroniko in Vakuumsko Tehniko, Teslova 30, 1111 Ljubljana, Slovenia
Jan Leskovšek ; Inštitut za Elektroniko in Vakuumsko Tehniko, Teslova 30, 1111 Ljubljana, Slovenia

Sažetak

Construction and testing of thin-film capacitive relative-humidity sensors, using a polymer film as dielectric, are presented. Methods of deposition of the upper electrode, which must have proper electrical conductivity and be porous to assure a quick response to changes of relative humidity in the environment, is discussed. The upper electrodes were deposited by vacuum evaporation of Ni, Cr and Ni-Cr alloy. The angle of incidence of evaporated material was varied with the aim to change porosity and, therefore, the response time.

Ključne riječi

Hrčak ID:

299600

URI

https://hrcak.srce.hr/299600

Datum izdavanja:

2.5.1996.

Podaci na drugim jezicima: hrvatski

Posjeta: 447 *