Original scientific paper
On the applicability of different methods of XRD line profiles analysis in estimating grain size and microstrain in tungsten thin films
Igor Đerđ
; Departemnt of Physics, Faculty of Science, University of Zagreb, Bijenička 32, P. O. Box 331, HR-10002 Zagreb, Croatia
Anđelka Tonejc
; Departemnt of Physics, Faculty of Science, University of Zagreb, Bijenička 32, P. O. Box 331, HR-10002 Zagreb, Croatia
Antun Tonejc
; Departemnt of Physics, Faculty of Science, University of Zagreb, Bijenička 32, P. O. Box 331, HR-10002 Zagreb, Croatia
Nikola Radić
; Ruđer Bošković Institute, Bijenička c. 54, P.O.Box 180, HR-10002, Zagreb, Croatia
Abstract
Different methods of X-ray diffraction line profile analysis (XRDLPA) are used to study microstructural parameters such as crystallite size (diffracted domain size), microstrain and texture in tungsten thin films deposited on glass by DC magnetron sputtering at different substrate temperatures and at different working-gas pressures. The whole-pattern analysis within the Rietveld method, the "single-line" method and "double Voigt" method (equivalent to the Warren-Averbach method) are applied and mutually compared. In addition, the results obtained by the Scherrer method are also discussed. The line broadening has been found to be isotropic, supporting the reliability of usage of the Rietveld method in the size-microstrain extraction.
Keywords
tungsten thin film; X-ray diffraction; grain size; microstrains
Hrčak ID:
302054
URI
Publication date:
1.3.2006.
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