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Errors arising from surface roughness in ellipsometric measurements

Kazimierz Brudzewski ; Institute of Physics, Technical University of Warsaw, Warsawa


Puni tekst: engleski pdf 1.790 Kb

str. 177-183

preuzimanja: 14

citiraj


Sažetak

A problem of importance to many investigators is the effect of surface imperfections on the measured thickness and refractive index of a thin film overlaying that surface. In this paper, errors produced by neglecting the roughness of the surface are presented.

Ključne riječi

Hrčak ID:

322516

URI

https://hrcak.srce.hr/322516

Datum izdavanja:

2.9.1974.

Posjeta: 46 *