Letter to the Editor
Errors arising from surface roughness in ellipsometric measurements
Kazimierz Brudzewski
; Institute of Physics, Technical University of Warsaw, Warsawa
Abstract
A problem of importance to many investigators is the effect of surface imperfections on the measured thickness and refractive index of a thin film overlaying that surface. In this paper, errors produced by neglecting the roughness of the surface are presented.
Keywords
Hrčak ID:
322516
URI
Publication date:
2.9.1974.
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