Meeting abstract
Iron as an impurity in silicon
M. Stojić
; “Boris Kidrič” Institute of Nuclear Sciences, Belgrade
V. Spirić
; “Boris Kidrič” Institute of Nuclear Sciences, Belgrade
D. Rostoški
; “Boris Kidrič” Institute of Nuclear Sciences, Belgrade
Abstract
The behaviour of Fe in Si has been studied by Fe⁵⁹ radioactive tracers method and ESR measurement of Fe-interstitial resonant line. The major quantity of Fe⁵⁹ precipitates on the specimens’ surfaces (6 × 10¹⁶ cm⁻³).
The interstitial mechanism of iron diffusion in Si is proposed. The concentration of diffused-in Fe⁵⁹ depends on the concentration of native iron which is present in almost all Si crystals. At room temperature, unstable Fe interstitials do not interact with self-interstitials and vacancies produced by Co⁶⁰ gamma rays.
Keywords
Hrčak ID:
340697
URI
Publication date:
15.12.1980.
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