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Nanomaterials and Nanotechnology, Vol. 4 No. Godište 2014, 2014.

Short communication, Note

https://doi.org/10.5772/59483

Miniaturized Wide-Range Field-Emission Vacuum Gauge

Amra Avdić ; Institute of Solid State Electronics, Vienna University of Technology, Vienna, Austria
Anna Maria Lausch ; Institute of Solid State Electronics, Vienna University of Technology, Vienna, Austria
Emmerich Bertagnolli ; Institute of Solid State Electronics, Vienna University of Technology, Vienna, Austria
Alois Lugstein orcid id orcid.org/0000-0001-5693-4775 ; Institute of Solid State Electronics, Vienna University of Technology, Vienna, Austria

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Abstract

Miniaturized vacuum gauges (MVGs) for the measurement range 5.7x10-7 to 1.1x10-2 mbar were fabricated in a self-aligned approach using focused ion beam (FIB) nanomachining and reactive ion etching (RIE). The MVG consists of two properly insulated electrodes integrated on top of an atomic force microscopy (AFM) tip, forming a coaxial embodiment. The special design enables us to vary the cathode-anode separation and the turn-on voltage changes accordingly. The experiments show that the MVGs operate at low bias potential and demonstrate very good I-P dependence over a wide pressure range.

Keywords

nanoscale vacuum gauge; field emission

Hrčak ID:

142641

URI

https://hrcak.srce.hr/142641

Publication date:

1.1.2014.

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