Original scientific paper
Measurements of the electron energy distribution function in two different regions of DC-magnetron sputtering device
F. F. Elakshar
; Physics Department, Faculty of Science, Azhar University, Egypt
M. A. Hassouba
; Physics Department, Faculty of Science, Benah University, Egypt
A. A. Garamoon
; Physics Department, Faculty of Science, Azhar University, Egypt
Abstract
The electron energy distribution function (EEDF) at the edge of the cathode fall and positive column regions of Ar and He glow discharge were measured using a single Langmuir probe. The EEDF in the cathode fall region was found to be non-Maxwellian where two groups of electrons were detected. The two groups have no chance to be thermalized since they leave the cathode fall region fast. Sources of the two groups of electrons are discussed. Moreover, EEDF in the positive column region was found to be Maxwellian for both gases. Electrons have a chance to thermalize themselves due to the long plasma lifetime in this region.
Keywords
Ar and He glow discharge; electron energy distribution function; cathode fall and positive column region
Hrčak ID:
301093
URI
Publication date:
1.9.2000.
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