Kratko priopćenje
Miniaturized Wide-Range Field-Emission Vacuum Gauge
Amra Avdić
; Institute of Solid State Electronics, Vienna University of Technology, Vienna, Austria
Anna Maria Lausch
; Institute of Solid State Electronics, Vienna University of Technology, Vienna, Austria
Emmerich Bertagnolli
; Institute of Solid State Electronics, Vienna University of Technology, Vienna, Austria
Alois Lugstein
orcid.org/0000-0001-5693-4775
; Institute of Solid State Electronics, Vienna University of Technology, Vienna, Austria
Sažetak
Miniaturized vacuum gauges (MVGs) for the measurement range 5.7x10-7 to 1.1x10-2 mbar were fabricated in a self-aligned approach using focused ion beam (FIB) nanomachining and reactive ion etching (RIE). The MVG consists of two properly insulated electrodes integrated on top of an atomic force microscopy (AFM) tip, forming a coaxial embodiment. The special design enables us to vary the cathode-anode separation and the turn-on voltage changes accordingly. The experiments show that the MVGs operate at low bias potential and demonstrate very good I-P dependence over a wide pressure range.
Ključne riječi
nanoscale vacuum gauge; field emission
Hrčak ID:
142641
URI
Datum izdavanja:
1.1.2014.
Posjeta: 1.085 *