Izvorni znanstveni članak
Interaction of polyether sulphone with oxygen plasma
Lidija I. Belič
; Institute of Electronic and Vacuum Technique, Teslova 30, 61000 Ljubljana, Slovenia
Miran Mozetič
; Institute of Electronic and Vacuum Technique, Teslova 30, 61000 Ljubljana, Slovenia
Karol Požun
; Institute of Electronic and Vacuum Technique, Teslova 30, 61000 Ljubljana, Slovenia
Sažetak
Polyether sulphone was found to be a useful material for production of high reliability humidity sensors. In order to obtain best properties of the sensors, the polymer surface should be activated before a thin layer of metal is deposited. A way to do it is exposition of the polymer to oxygen plasma. In order to prevent destructive action of the plasma, a very mild inductively coupled RF oxygen plasma was created in a vacuum system. The plasma density was of the order of 1016 m-3, and the electron temperature 4 eV. Active particles produced in plasma interact with the polymer causing oxidation of the surface layer and a continuous thinning of the polymer foil. In our case the rate of thinning was 25 mm per hour.
Ključne riječi
Hrčak ID:
299607
URI
Datum izdavanja:
2.5.1996.
Posjeta: 394 *