Pregledni rad

Friction compensation in ultrahigh-precision positioning

Ervin Kamenar ; Tehnički fakultet Sveučilišta u Rijeci
Saša Zelenika ; Centar za mikro- i nanoznanosti i tehnologije
Marko Perčić ; Tehnički fakultet Sveučilišta u Rijeci

Sažetak

Ultrahigh -precision positioning devices are essential in precision engineering and microsystems’ technologies. As they need to allow sub- micrometric or even nanometric displacements, their nonlinear frictional behaviour, induced by a number of sliding and rolling components, has to be efficiently compensated for. If a model-based approach is followed, suitable modelling of such disturbances, which is generally performed using state-of the art friction models, has to be performed. An overview of different compensation and control algorithms applied to ultrahigh-precision positioning systems is hence given in this work.

Ključne riječi

friction compensation, ultrahigh-precision, precision engineering, microsystem technologies, control algorithms

Hrčak ID:

251279

URI

https://hrcak.srce.hr/251279

Datum izdavanja:

15.12.2020.

Posjeta: 818 *