Review article

Friction compensation in ultrahigh-precision positioning

Ervin Kamenar ; University of Rijeka, Faculty of Engineering
Saša Zelenika ; University of Rijeka, Centre for Micro- and Nanosciences and Technologies
Marko Perčić ; University of Rijeka, Faculty of Engineering

Abstract

Ultrahigh -precision positioning devices are essential in precision engineering and microsystems’ technologies. As they need to allow sub- micrometric or even nanometric displacements, their nonlinear frictional behaviour, induced by a number of sliding and rolling components, has to be efficiently compensated for. If a model-based approach is followed, suitable modelling of such disturbances, which is generally performed using state-of the art friction models, has to be performed. An overview of different compensation and control algorithms applied to ultrahigh-precision positioning systems is hence given in this work.

Keywords

friction compensation, ultrahigh-precision, precision engineering, microsystem technologies, control algorithms

Hrčak ID:

251279

URI

https://hrcak.srce.hr/251279

Publication date:

15.12.2020.

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